Stoichiometric Control and Optical Properties of BaTiO₃ Thin Films Grown by Hybrid MBE

BaTiO3 is a technologically relevant material in the perovskite oxide class with above room temperature ferroelectricity and very large electro optical coefficient, making it highly suitable for emerging electronic photonic devices. An easy, robust, straightforward, scalable growth method required to synthesize epitaxial thin films sufficient control over film stoichiometry achieve reproducible properties. Here we report of by hybrid molecular beam epitaxy. A self regulated window identified using complementary information obtained from reflection high energy electron diffraction, intrinsic lattice parameter, surface morphology, scanning transmission microscopy. Subsequent characterization spectroscopic ellipsometry revealed refractive index extinction coefficient values closely resembling those stoichiometric bulk crystals grown inside window. Even absence parameter change films, degradation properties was observed, accompanied appearance wide absorption peak infrared spectrum, attributed transitions involving defect states present. Therefore, can be utilized as much finer more straightforward probe determine level present films.